Datasets:

ClarusC64
/

euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1/data/test.csv (at revision 988f53cb52d9d5fd76d34b93e921aad5aa16d589), [/tmp/hf-datasets-cache/medium/datasets/16138164620796-config-parquet-and-info-ClarusC64-euv-projection--66f12d9b/hub/datasets--ClarusC64--euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1/snapshots/988f53cb52d9d5fd76d34b93e921aad5aa16d589/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1@988f53cb52d9d5fd76d34b93e921aad5aa16d589/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              overlay_drift_score: double
              overlay_error_nm: double
              overlay_spec_nm: double
              thermal_mode1_nm: double
              thermal_mode2_nm: double
              coolant_flow_lpm: int64
              chamber_temp_c: double
              failure_horizon_wafers: double
              overlay_risk_score: double
              recommended_routing_action: double
              minimal_fix_set: string
              notes: string
              constraints: double
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2208
              to
              {'id': Value('string'), 'case_title': Value('string'), 'overlay_drift_score': Value('float64'), 'overlay_error_nm': Value('float64'), 'overlay_spec_nm': Value('float64'), 'thermal_mode1_nm': Value('float64'), 'thermal_mode2_nm': Value('float64'), 'coolant_flow_lpm': Value('int64'), 'chamber_temp_c': Value('float64'), 'failure_horizon_wafers': Value('int64'), 'overlay_risk_score': Value('float64'), 'recommended_routing_action': Value('string'), 'minimal_fix_set': Value('string'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1/data/test.csv (at revision 988f53cb52d9d5fd76d34b93e921aad5aa16d589), [/tmp/hf-datasets-cache/medium/datasets/16138164620796-config-parquet-and-info-ClarusC64-euv-projection--66f12d9b/hub/datasets--ClarusC64--euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1/snapshots/988f53cb52d9d5fd76d34b93e921aad5aa16d589/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-overlay-failure-horizon-and-thermal-control-routing-v0.1@988f53cb52d9d5fd76d34b93e921aad5aa16d589/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id string	case_title string	overlay_drift_score float64	overlay_error_nm float64	overlay_spec_nm float64	thermal_mode1_nm float64	thermal_mode2_nm float64	coolant_flow_lpm int64	chamber_temp_c float64	failure_horizon_wafers int64	overlay_risk_score float64	recommended_routing_action string	minimal_fix_set string	notes string
EUV-POH-001	Stable overlay	0.05	1.6	5	1	0.6	42	21.1	999	0.04	none	none	Healthy
EUV-POH-002	Minor drift	0.12	2.3	5	1.6	1	42	21.4	520	0.1	monitor	increase sampling; tighten overlay gates	Watch
EUV-POH-003	Early drift	0.22	3.4	5	2.3	1.6	41	21.8	260	0.22	reduce duty cycle	duty cap; stabilize soak	Prevention
EUV-POH-004	Drift crossing	0.34	4.6	5	3.1	2.1	40	22.2	140	0.38	redistribute illumination	pupil rebalance; dose reshape	Thermal hot spot
EUV-POH-005	Spec breach risk	0.46	5.3	5	3.9	2.8	40	22.5	90	0.52	thermal pre-compensation	apply thermal model offsets	Keep printing
EUV-POH-006	Cooling instability	0.58	6.7	5	4.8	3.5	38	22.8	55	0.67	coolant retune	restore flow; verify delta-T	Cooling axis
EUV-POH-007	Mount sensitivity	0.66	7.5	5	5.5	4.1	38	23	40	0.76	pause and stabilize	soak; clamp check; re-zero	Mount drift
EUV-POH-008	Contamination load	0.74	8.6	5	6.2	4.7	37	23.2	28	0.84	illumination hardware check	inspect optics; contamination check	Absorption rising
EUV-POH-009	Critical overlay loss	0.86	10.2	5	6.9	5.3	36	23.4	14	0.93	stop and service	halt; service projection optics	Imminent failure
EUV-POH-010	Overlay failure imminent	0.94	11.5	5	7.4	5.8	35	23.6	6	0.97	halt tool	halt; cooldown; full recalibration	Failure horizon

What this dataset tests

Predict when overlay will breach spec
and route the minimal thermal control response.

This is the third layer of projection optics thermo-mechanical decoupling:

overlay drift score
overlay error growth
failure horizon forecasting
thermal control routing

Task

Given current tool state, output:

failure_horizon_wafers
overlay_risk_score (0..1)
recommended_routing_action
minimal_fix_set

Output format: float,float,string,string

Example: 55,0.67,coolant retune,restore flow; verify delta-T

Inputs

overlay_drift_score
overlay_error_nm
overlay_spec_nm
thermal_mode1_nm
thermal_mode2_nm
coolant_flow_lpm
chamber_temp_c

Targets

failure_horizon_wafers
overlay_risk_score
recommended_routing_action
minimal_fix_set

Routing action options

monitor
reduce duty cycle
redistribute illumination
thermal pre-compensation
coolant retune
pause and stabilize
illumination hardware check
stop and service
halt tool

Evaluation

Relative error on horizon
Absolute error on risk
Bonus for action match
Bonus for fix-set overlap

Version

v0.1

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Total file size:

8.65 kB